MACHINING END POINT DETECTING METHOD, GRINDING METHOD, AND GRINDER

摘要

A method for detecting the timing of a machining end point (grinding stop, change of grinding condition) by computing a characteristic value of the surface to be machined of a machining object such as a substrate. A spectral waveform indicating the relation between the reflection intensity and the wavelength at the machining end point is created by using a reference machining object or by performing simulation calculation. According to the spectral waveform, the wavelengths at which the reflection intensity takes on maximum and minimum values are selected. A characteristic value with respect to the surface to be machined is computed from the reflection intensity at the selected wavelength. The feature point of the temporal variation of the characteristic value at the machining end point is set as the machining end point. By detecting the feature point while machining the machining object, the machining end point of the machining object is detected.