发明名称 BONDING METHOD AND BONDING STRUCTURE FORMED USING THE SAME
摘要 In view of the problems in all existing bonding methods, such as high temperature, high pressure, and high surface modification cost, etc., the present invention provides a bonding method and a bonding structure formed using the same, which can overcome such drawbacks and also achieve wafer-level bonding under a condition of normal temperature and low pressure. The bonding method comprises: generating bonding structures capable of being mutually mechanical interlocked, wherein, the frictional heat generated by the bonding structures capable of being mutually mechanical interlocked is higher than the bonding energy therebetween; and, utilizing the frictional heat generated by the bonding structures capable of being mutually mechanical interlocked to bond the bonding structures capable of being mutually mechanical interlocked.
申请公布号 US2016172326(A1) 申请公布日期 2016.06.16
申请号 US201414392281 申请日期 2014.01.26
申请人 TSINGHUA UNIVERSITY 发明人 CAI Jian;LIU Ziyu;WANG Qian;WANG Shuidi;HU Yang;CHEN Yu
分类号 H01L23/00 主分类号 H01L23/00
代理机构 代理人
主权项
地址 Beijing CN