| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection system that can concurrently inspect a linear defect and a periodic defect in an inspection target.SOLUTION: An inspection system 1 carries an optical film 2 and conducts defect inspection. The inspection system 1 includes a scanning device 10 having a line illumination 11, an imaging section 12, and a marking section 13, and an inspection device 20. The line illumination 11 is arranged with its longitudinal direction set to be the same as the direction in which the film is carried. The imaging section 12 takes an image of the optical film 2 by receiving inspection light reflected from the optical film 2 at a line sensor 12b with its longitudinal direction set to be the same as the direction in which the film is carried. The scanning device 10 takes an image of the optical film 2 while moving into the film width direction, and the inspection device 20 detects a linear defect and a periodic defect from the image taken of the optical film 2.SELECTED DRAWING: Figure 1 |
