发明名称 |
SEMICONDUCTOR DEVICE AND METHOD |
摘要 |
A semiconductor device and a manufacturing method thereof are provided. In an embodiment, a first semiconductor device and a second semiconductor device are formed within a semiconductor wafer, and a scribe region is patterned between the first semiconductor device and the second semiconductor device. A singulation process is then utilized within the scribe region to singulate the first semiconductor device from the second semiconductor device. The first semiconductor device and the second semiconductor device are then bonded to a second semiconductor substrate and thinned in order to remove extension regions from the first semiconductor device and the second semiconductor device. |
申请公布号 |
KR20160100178(A) |
申请公布日期 |
2016.08.23 |
申请号 |
KR20150045944 |
申请日期 |
2015.04.01 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
YU CHEN HUA;CHANG HUNG PIN;CHEN YI HSIU;YANG KU FENG;CHIOU WEN CHIH |
分类号 |
H01L21/768;H01L21/08;H01L21/20;H01L23/00 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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