LOCAL ANALYSIS INSTRUMENT

摘要

PROBLEM TO BE SOLVED: To provide a practical and simple mechanism for preventing the effect of vibration without losing the driving property or functionality of a sample stage in a local analysis instrument for analyzing a micro area using an electron beam. SOLUTION: The local analysis instrument has a telescopic vibration proof arm 10 whose end is fixed to a lens barrel 3 and the tip can be extended into a lens barrel, and a pressure fixing device 20 for fine tuning the position and the pressing force of the vibration proof arm 10. The pressure fixing device 20 presses the tip of the vibration proof arm 10 to press the sample fixing holder 5 held on the sample stage 6 or a sample 4 to integrate the sample 4 and the lens barrel 3. The pressure fixing device 20 has a sample handling function. The vibration proof arm 10 has a spring 14 for energizing the tip portion 12 to the direction of extension. COPYRIGHT: (C)2005,JPO&NCIPI