发明名称 |
MACHINING METHOD OF MICROSTRUCTURE AND MACHINING SYSTEM OF MICROSTRUCTURE |
摘要 |
A machining method of microstructure in which an opposed-surface plate (211) is moved from a retreat position to a forming position and a film (1) is pressed against a die (5) and machined. Subsequently, a second block (211b) is separated from a first block (211a). Consequently, the total thermal capacity of the opposed-surface plate (211) is reduced by reducing the volume of the opposed-surface plate (211) at the time of cooling and cooling rate of the opposed-surface plate (211) can be enhanced by physically discharging heat stored in the opposed-surface plate (211). The cooling efficiency of the opposed-surface plate (211) is thereby enhanced and the heat cycle thereof can be shortened. |
申请公布号 |
WO2006090682(A1) |
申请公布日期 |
2006.08.31 |
申请号 |
WO2006JP303016 |
申请日期 |
2006.02.21 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD.;YORITA, JUN;MIKAGE, KATSUNARI |
发明人 |
YORITA, JUN;MIKAGE, KATSUNARI |
分类号 |
B29C59/02;B29C43/32;B29C43/36;B29C43/52;B81C99/00;B82B3/00;H01L21/027 |
主分类号 |
B29C59/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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