Materials, methods and devices to detect and quantify water vapor concentrations in an atmosphere

摘要

We have demonstrated that a surface acoustic wave (SAW) sensor coated with a nanoporous framework material (NFM) film can perform ultrasensitive water vapor detection at concentrations in air from 0.05 to 12,000 ppmv at 1 atmosphere pressure. The method is extendable to other MEMS-based sensors, such as microcantilevers, or to quartz crystal microbalance sensors. We identify a specific NFM that provides high sensitivity and selectivity to water vapor. However, our approach is generalizable to detection of other species using NFM to provide sensitivity and selectivity.

主权项

1. A humidity sensor comprising;
a surface acoustic wave (SAW) device formed on one surface of a quartz substrate, the SAW device comprising a plurality of interdigitated electrodes; and a material comprising a nanoporous framework material (NFM) coating, wherein the NFM coating is covalently bonded to at least a portion of the one surface between the plurality of interdigitated electrodes, wherein the NFM coating is selected from the list consisting of copper (II) benzene-1,3,5-tricarboxylate, copper (II) biphenyl-3,3′,5,5′-tetracarboxylic acid, and copper (II) terphenyl-3,3′,5,5′-tetracarboxylic acid.