| 摘要 |
PROBLEM TO BE SOLVED: To restrict influence by chamber atmosphere, to increase the degree of freedom in design, to facilitate a reduction in the size of the device and adjustment of raising/lowering speed, and to hinder fluctuation in raising/lowering speed.SOLUTION: A workpiece conveyance device comprises: a multistage magazine 10 accommodating a carrier 12; a moving stage 18 that receives the carrier 12 from the magazine 10; X-Y conveying means that is driven by motors 22, 23 attached to the outside of an airtight chamber 14 and moves the moving stage 18 in X-Y direction; raising/lowering means that raises/lowers the carrier 12 in Z direction at the return position of the moving stage 18 by an eccentric cam 42 rotated by a motor 24 attached to the outside of the airtight chamber 14; and a processing device that performs specific processing for the carrier 12 conveyed to a processing position by the moving stage 18. The raising/lowering means causes the eccentric cam 42 to raise the carrier 12 at the return position, thus enabling the carrier 12 to be carried in/carried out. The raising/lowering means causes the eccentric cam 42 to lower the carrier 12, thus allowing the carrier 12 to be moved in the X-Y direction of the moving stage 18 while being positioned. |
