HEAT CONDUCTIVE ALD-COATING IN AN ELECTRICAL DEVICE

摘要

A method for providing a heat conductive coating (60) on a surface of a substrate (20), and a heat conductive coating, comprising depositing at least one thin continuous layer of a first material by ALD; wherein the first material has a lower heat conductivity than the substrate. An electronic component (50) produces heat, which is transferred to the heat conductive coating by phonons and is dissipated.