发明名称 磁性細線搭載基板の製造方法
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method for enabling miniaturization of a substrate mounted with magnetic fine lines in which a track of a recording medium and pixels of a spatial light modulator are formed of magnetic fine lines and that is unlikely to cause malfunction.SOLUTION: The manufacturing method for a substrate 10 mounted with magnetic fine lines includes: a magnetic fine line forming step of forming a plurality of magnetic fine lines 1 on a substrate 2; a mask forming step of providing a resin film 9 on the plurality of magnetic fine lines 1 and forming grooves 9c extending in the width direction of the fine lines across the right above of all the magnetic fine lines 1 on the surface of the resin film 9; and a magnetic fine line surface etching step of performing etching with the resin film 9 defined as a mask and forming recesses 1c on each magnetic fine line 1 at parts right below the grooves 9c of the resin film 9. The recesses 1c for locking magnetic domain walls that divide magnetic domains are formed with high dimensional accuracy so as to stabilize an operation when shifting the magnetic domains in the magnetic fine lines 1.
申请公布号 JP6010344(B2) 申请公布日期 2016.10.19
申请号 JP20120116023 申请日期 2012.05.21
申请人 日本放送協会 发明人 宮本 泰敬;奥田 光伸;林 直人
分类号 G11B5/84;G11B5/65 主分类号 G11B5/84
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