| 摘要 |
A shape measuring apparatus includes: a probe having a stylus tip; a movable mechanism configured to move the stylus tip; an information acquiring unit configured to acquire design information of a workpiece; a path setting unit configured to set a path of the stylus tip; a path component calculating section configured to calculate a path velocity vector; a push direction component calculating section configured to detect a deflection, and calculate a push correction vector; a locus correction component calculating section configured to detect an amount and a direction of locus deviation of the probe from the path, and calculate a locus correction vector; a velocity synthesizing section configured to calculate a velocity synthesis vector by combining the path velocity vector, the push correction vector, and the locus correction vector; and a drive control unit configured to move the probe according to the velocity synthesis vector. |
