PIPING IDENTIFICATION DEVICE FOR SEMICONDUCTOR TO EXCHANG EASILY PIPING UNIT

摘要

PURPOSE: A piping identification device for semiconductor is provided to perform easily a process for exchanging a piping unit by adhering the piping identification device to the piping unit. CONSTITUTION: A combination body(50) includes a combination groove which is coupled to a piping unit(1). The combination groove has an open side. The combination body is used for covering the outside of the piping unit. The combination body further includes an identification unit in order to identify the kind of the piping unit. A coupling/decoupling unit is used for coupling the piping unit to the combination groove or the combination body form the piping unit.