| 摘要 |
PROBLEM TO BE SOLVED: To change the holding of a substrate between a first holding member coupled with a first counter member facing one principal surface of a substrate so as to rotate integrally therewith, and a second holding member coupled with a second counter member facing the other principal surface of a substrate so as to rotate integrally therewith.SOLUTION: A substrate W is held by any one of a blocking plate side clamp member 37 coupled with a blocking plate 4 facing the upper surface of a substrate W so as to rotate integrally therewith, or a chuck side clamp member 7 coupled with a spin base 6 facing the lower surface of a substrate W so as to rotate integrally therewith. Thereafter, holding of the substrate W held by any one of the blocking plate side clamp member 37 or the chuck side clamp member 7 is switched to the other of the blocking plate side clamp member 37 or the chuck side clamp member 7. |
