发明名称 HEAT TREATMENT DEVICE
摘要 PROBLEM TO BE SOLVED: To solve a problem in a conventional heat treatment device wherein as a heater does not partially exist in the circumferential direction of an inner periphery of a furnace body, the temperature control is difficult and heated matter cannot be uniformly heated. SOLUTION: This heat treatment device is composed of a cylindrical furnace body and a plurality of stages of heater element formed by vertically separating the heater element mounted around an inner peripheral face of the cylindrical furnace body in a state of being waved up and down, the heater elements of the plurality of stages are connected with each other in series through their end parts, the heater elements are arranged in a state that the end part of each heater element is extended in the circumferential direction, and a wave height of the end part is lower than a wave height of the other part of the heater element, and the heater elements are overlapped while vertically separated from each other. Further this heat treatment device comprises the cylindrical furnace body and the plurality of stages of heater element formed by vertically separating the heater element mounted around the inner peripheral face of the cylindrical furnace body in a state of being waved up and down, each heater element has a transfer part where the heater element of one of the plurality of stages is transferred to the heater element of the other stage adjacent thereto, the transfer part is extended obliquely to the circumferential direction, and the transfer parts of the heater elements are overlapped while vertically separated from each other. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005207677(A) 申请公布日期 2005.08.04
申请号 JP20040015189 申请日期 2004.01.23
申请人 SAKAGUCHI DENNETSU KK 发明人 TANAKA SADAYOSHI;YOSHIDA TAKESHI
分类号 F27D11/02;H01L21/22;H01L21/324;(IPC1-7):F27D11/02 主分类号 F27D11/02
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