| 摘要 |
An apparatus for removing surface contamination and/or processing a surface is provided to facilitate dealing of the apparatus and to increase degree of freedom by arranging a laser and an inhalation unit on a surface with predetermined distance. An apparatus for removing surface contamination and/or processing a surface includes at least one generator and a unit capable of generating directivity wave(8), delivering energy on a surface precipitate of a reactor inside or/and a reactor pressure vessel, and exfoliating and sublimating the surface precipitate. The generator includes one or more laser(2) as a generation source, an optical unit, and glass fiber(20) or a mirror system.
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