发明名称 |
METHOD AND APPARATUS FOR CONTROLLING FILM DEPOSITION |
摘要 |
<p>The disclosure relates to a method for depositing films on a substrate which may form part of an LED or other types of display. In one embodiment, the disclosure relates to an apparatus for depositing ink on a substrate. The apparatus includes a chamber for receiving ink; a discharge nozzle having an inlet port and an outlet port, the discharge nozzle receiving a quantity of ink from the chamber at the inlet port and dispensing the quantity of ink from the outlet port; and a dispenser for metering the quantity of ink from the chamber to the inlet port of the discharge nozzle; wherein the chamber receives ink in liquid form having a plurality of suspended particles and the quantity of ink is pulsatingly metered from the chamber to the discharge nozzle; and the discharge nozzle evaporates the carrier liquid and deposits the solid particles on the substrate.</p> |
申请公布号 |
EP2155494(A1) |
申请公布日期 |
2010.02.24 |
申请号 |
EP20080771084 |
申请日期 |
2008.06.13 |
申请人 |
MASSACHUSETTS INSTITUTE OF TECHNOLOGY |
发明人 |
BULOVIC, VLADIMIR;CHEN, JIANGLONG;MADIGAN, CONOR FRANCIS;SCHMIDT, MARTIN A. |
分类号 |
H01L33/00;B41J2/14;B41M5/382;G02F1/1335;H05B33/00 |
主分类号 |
H01L33/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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