| 发明名称 |
VAPOR DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS |
| 摘要 |
A vapor deposition apparatus for depositing a thin film on a substrate, by which a deposition process is efficiently performed and deposition film characteristics are easily improved, and a vapor deposition apparatus including: a stage onto which a substrate is disposed; and a supply unit disposed to face the substrate and having a main body member and a nozzle member disposed on one surface of the main body member facing the substrate, to sequentially supply a plurality of gases towards the substrate, and a method of manufacturing an organic light-emitting display apparatus using the same. |
| 申请公布号 |
US2016348241(A1) |
申请公布日期 |
2016.12.01 |
| 申请号 |
US201615231647 |
申请日期 |
2016.08.08 |
| 申请人 |
Samsung Display Co., Ltd. |
发明人 |
Jang Cheol-Min;Huh Myung-Soo;Jung Suk-Won;Kim Jae-Hyun;Kim Sung-Chul;Kim Jin-Kwang;Shim Chang-Woo;Key Sung-Hun;Kim In-Kyo |
| 分类号 |
C23C16/455;H01L51/00;C23C16/44;H01L51/56 |
主分类号 |
C23C16/455 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A vapor deposition apparatus comprising:
a stage onto which a substrate is disposed; and a supply unit disposed to face the substrate and comprising a main body member and a nozzle member disposed on one surface of the main body member and facing the substrate, to sequentially supply a plurality of gases towards the substrate. |
| 地址 |
Yongin-si KR |
