| 摘要 |
PROBLEM TO BE SOLVED: To provide a target assembly which can prevent immersion of a bonding material into a gap between target members, and a manufacturing method of the assembly.SOLUTION: A target assembly according to an embodiment of the invention includes a backing plate 10, multiple target members 21, a shielding member 40, and a bonding material 30. The backing plate 10 has a supporting surface 10a. The multiple target members 21 have a first main surface 21a bonded to a supporting surface 10a, and are arranged each other at a space G with a first width W1. The shielding member 40 has a bonding surface 41a bonded to the first main surface 21a, and shields the space G. The bonding material 30 bonds together the supporting surface 10a and the first main surface 21a to which the shielding member 40 is bonded. |
