| 摘要 |
An electronic device includes: a lower electrode; a first piezoelectric film provided on the lower electrode; and an upper electrode provided on the first piezoelectric film. At least one of the lower electrode and the upper electrode is made of an alloy composed primarily of aluminum and doped with at least one element selected from the group consisting of Ni, Co, V, Ta, Mo, W, Ti, Y, and Nd. Alternatively, an electronic device includes: a support substrate; a lower electrode provided on the support substrate; a first piezoelectric film provided on the lower electrode; and an upper electrode provided on the first piezoelectric film. The lower electrode is made of an alloy composed primarily of aluminum and doped with at least one element selected from the group consisting of Ni, Co, V, Ta, Mo, W, Ti, Y, and Nd. |
