| 摘要 |
<P>PROBLEM TO BE SOLVED: To realize a long pulse of EUV emission without giving a large heat load to an electrode like a conventional one and requiring a high precision control. <P>SOLUTION: A pulse current is supplied between a first and a second electrodes 2a, 2b installed inside a chamber 1 and a discharge channel is formed between the electrodes. Furthermore, laser beams L1 emitted from a laser source 7 are irradiated to a high temperature plasma material 8, and a low temperature plasma gas of an ion density of 10<SP>17</SP>-10<SP>20</SP>cm<SP>-3</SP>level is supplied to a narrow discharge channel formed between the electrodes 2a, 2b. Discharge acts on the low temperature plasma gas and the electron temperature increases to make a high temperature plasma and EUV emission is started. Since the low temperature plasma gas is continuously supplied to the discharge channel, a pinch effect or a confinement effect by a self magnetic field is carried out repeatedly and the EUV emission continues. This EUV emission is condensed by an EUV condenser 4 and is emitted from an EUV light extraction part 5. <P>COPYRIGHT: (C)2009,JPO&INPIT |
