HARD MAGNETIC ALLOY THIN FILM USED IN HIGH DENSITY PERPENDICULAR MAGNETIC RECORDING MEDIUM

摘要

This invention discloses a hard magnetic alloy thin film used in a high density perpendicular magnetic recording medium. This film incorporates a glass substrate and a ferromagnetic layer formed on the glass substrate. The ferromagnetic layer is deposited onto the substrate using a sputtering deposition and an annealing. After annealing, a single-layered ferromagnetic film with high perpendicular magnetic anisotropy is achieved.

主权项

1. A hard magnetic alloy thin film used in a high density perpendicular magnetic recording medium, the hard magnetic alloy thin film comprising:
a glass substrate; and a ferromagnetic layer formed on the glass substrate, wherein the ferromagnetic layer is formed on the glass substrate by a sputtering process and then annealed to form a single-layered ferromagnetic alloy film with perpendicular magnetic anisotropy, wherein the sputtering process provides peak power density of 1000-3600 W/cm2 for a target, the sputtering process is a high power impulse magnetron sputtering (HIPIMS) process, and the ferromagnetic layer has peaks of Fe ion in a high energy region of 200 nm-400 nm with a plasma spectroscope determining by optical emission spectrometer.