| 摘要 |
A plasma processing apparatus which generates plasma in a processing vessel supplied with a gas by applying a high-frequency voltage between first and second electrodes and performs plasma processing on a substrate to be processed, the plasma processing apparatus includes a recording unit configured to record a value, which represents a characteristic of the plasma processing performed on the substrate to be performed, in a time series, a identifying unit configured to identify a tendency of a time-series change of values recorded by the recording unit, a determination unit configured to determine whether an alarm is required based on the identified tendency of the time-series change and an alarm unit configured to output the alarm when it is determined that the alarm is required. |
