| 摘要 |
PROBLEM TO BE SOLVED: To provide an integrated circuit inspection device capable of improving inspection accuracy of an integrated circuit.SOLUTION: An integrated circuit inspection device 1 is a device for inspecting an integrated circuit 20 having a semiconductor substrate 21 and a circuit part 22 formed at a surface 21a side of the semiconductor substrate 21. The integrated circuit inspection device 1 includes: a light generation part 3 for generating light L radiated on the integrated circuit 20; wavelength width adjustment parts 5 and 14 for adjusting wavelength width of the light L radiated on the integrated circuit 20; an irradiation position adjustment part 8 for adjusting the irradiation position of the light L radiated on the integrated circuit 20; and a light detection part 12 for detecting the light L from the integrated circuit 20 when the light L from the light generation part 3 is radiated on the circuit part 22 via a rear face 21b of the semiconductor substrate 21.SELECTED DRAWING: Figure 1 |
