| 发明名称 |
COLOR FILTER ARRAY AND MICRO-LENS STRUCTURE FOR IMAGING SYSTEM |
| 摘要 |
A color filter array and micro-lens structure for imaging system and method of forming the color filter array and micro-lens structure. A micro-lens material is used to fill the space between the color filters to re-direct incident radiation, and form a convex micro-lens structure above a top surface of the color filters. |
| 申请公布号 |
US2016247854(A1) |
申请公布日期 |
2016.08.25 |
| 申请号 |
US201615144998 |
申请日期 |
2016.05.03 |
| 申请人 |
Taiwan Semiconductor Manufacturing Co., Ltd. |
发明人 |
Chen Szu-Ying;Yaung Dun-Nian;Wang Chen-Jong;Hsu Tzu-Hsuan |
| 分类号 |
H01L27/146 |
主分类号 |
H01L27/146 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of forming a semiconductor imaging system, comprising:
patterning a photodetector array on a semiconductor substrate; patterning a color filter array over the photodetector array; wherein the color filter array, after being patterned, has spaces between neighboring color filter elements of the color filter array; and applying a micro-lens material to the patterned color filter array; wherein the micro-lens material fills the spaces between neighboring color filter elements to establish sidewall waveguide structures and also covers upper surfaces of the color filter elements to establish convex micro-lens structures. |
| 地址 |
Hsin-Chu TW |
