摘要 |
Provided are a manufacturing method of catalyst-free substrate grown graphene, and the catalyst-free substrate grown graphene. The manufacturing method of catalyst-free substrate grown graphene comprises the following steps: (a) arranging a catalyst-free layer on a substrate; (b) supplying etching gas and carbon-containing gas, and conducting metal organic chemical vapor deposition (MOCVD); (c) supplying the etching gas for the catalyst-free layer when supplying the carbon-containing gas, and growing graphene on the catalyst-free layer; and (d) growing graphene on the substrate without having the catalyst-free layer by continuously removing all of the catalyst-free layer by the etching gas. |