| 摘要 |
Disclosed are an in-line deposition system and an in-line deposition method. The in-line deposition system includes a transfer module which supplies a substrate; an aligning module which is arranged on the back end of the transfer module and aligns and loads the substrate and the mask of a shuttle to form a shuttle body; a first up down module which is arranged on the back end of the align module and includes a first up down rail part which includes a first transfer rail and moves up and down; a first junction module which is arranged on the back end of the first up down module; a deposition processing module which is arranged on the back end of the first junction module and performs a deposition process on the substrate of the shuttle body; a second junction module which is arranged on the back end of the deposition process module; a bypass line module which connects the first junction module to the second junction module via the deposition process module and provides a path for transferring the shuttle; and a moving part which includes a processing rail which is installed in the aligning module, the first junction module, the deposition processing module and the second junction module and moves the shuttle body and a return rail which is installed in the first junction module, the second junction module, the bypass line module and transfers the shuttle. |
