发明名称 |
Patterning technique using a template, and a ink jet system |
摘要 |
<p>A template 1 is brought close to or in contact with a surface to be patterned 111 and patterns are formed with liquid 62 on the surface 111. This method comprises the steps of: bringing the template 1 close to or essentially in contact with the surface 111, supplying liquid 62 to a plurality of through holes 12 established in the pattern transfer region 10 of the template 1 for supplying the liquid 62, and separating the template 1 from the surface 111 after the liquid 62 is adhered to the surface 111 via the through holes 12. <IMAGE></p> |
申请公布号 |
EP0962962(A3) |
申请公布日期 |
2002.01.02 |
申请号 |
EP19990304095 |
申请日期 |
1999.05.26 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
NEBASHI, SATOSHI;NISHIKAWA, TAKAO;SHIMODA, TATSUYA |
分类号 |
B41F17/14;B41J2/01;B41M1/12;G02F1/1335;G02F1/1343;G03F7/34;H01L21/30;H01L21/311;H01L21/3213;H05K3/10;H05K3/12;(IPC1-7):H01L21/027;B29C45/26 |
主分类号 |
B41F17/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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