发明名称 DETERGENT
摘要 PROBLEM TO BE SOLVED: To remove fluorine-containing scale not by a physical means but by chemical and stable dissolution in a detergent liquid. SOLUTION: The detergent for removing fluorine-containing scale comprises 1-20 wt% of a first chelating agent selected from among alkylene polyamine polyacetic acids and ammonium and alkali metal salts thereof, 1-20 wt% of a second chelating agent different from the first chelating agent selected from among optionally hydroxyl group-containing carboxylic acids and ammonium and alkali metal salts thereof, an alkali agent in a sufficient amount for adjusting the pH of the detergent to 9-11, and water. The total amount of the first chelating agent and the second chelating agent is 5-30 wt% of the detergent. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005206620(A) 申请公布日期 2005.08.04
申请号 JP20040011351 申请日期 2004.01.20
申请人 ST LCD KK;YUKEN INDUSTRY CO LTD 发明人 KANNO HIROKAZU;NAKAMURA MOTONORI;KATO HISAYUKI;SATO SAKUJI;ITO MAKOTO;INAGAKI TOMIO;OSADA YOSHIO
分类号 B08B3/08;C11D7/26;C11D7/32;C11D7/60;H01L21/308;(IPC1-7):C11D7/60 主分类号 B08B3/08
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