发明名称 NEGATIVE BLUE-VIOLET LASER PHOTOSENSITIVE COMPOSITION, IMAGE FORMING MATERIAL, IMAGE FORMER AND METHOD OF IMAGE FORMATION
摘要 A negative blue-violet laser photosensitive composition that is highly sensitive to laser beams of blue-violet region, excelling in not only safe light properties under a yellow light but also the resolution and rectangularity of obtained image, which negative blue-violet laser photosensitive composition especially can appropriately be used as a dry film resist material and used in direct lithography by blue-violet laser beams. There are further provided, using the negative blue-violet laser photosensitive composition, an image forming material, image former and method of image formation. In particular, there is provided a negative blue-violet laser photosensitive composition wherein the minimum exposure intensity at which the exposure by blue-violet laser beams causes the residual film ratio to be 90% or higher is 40 mJ/cm2 or less and wherein with respect to a residual film ratio - exposure intensity curve obtained by plotting the residual film ratio at exposed part [t(%)] against the logarithm of exposure intensity by blue-violet laser beams [logE(mJ/cm2)], the gamma value of straight line binding point at a residual film ratio of 15% with point at a residual film ratio of 80%, t = gammalogE + delta, is 4.0x102 or more. There are further provided, using the negative blue-violet laser photosensitive composition, an image forming material, image former and method of image formation.
申请公布号 KR20060065576(A) 申请公布日期 2006.06.14
申请号 KR20057009394 申请日期 2004.09.22
申请人 MITSUBISHI CHEMICAL CORPORATION 发明人 MIZUKAMI JUNJI;KAMEYAMA YASUHIRO;TOSHIMITSU ERIKO;MIZUHO YUJI
分类号 G03F7/004;G03F7/027;G03F7/031;H01L21/02 主分类号 G03F7/004
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