Micro electro-mechanical system (MEMS) microphone device with multi-sensitivity outputs and circuit with the MEMS device

摘要

A MEMS device includes substrate having a cavity. A dielectric layer is disposed on a second side of substrate at periphery of the cavity. A backplate structure is formed with the dielectric layer on a first side of the substrate and exposed by the cavity. The backplate structure includes at least a first backplate and a second backplate. The first backplate and the second backplate are electric disconnected and have venting holes to connect the cavity and the chamber. A diaphragm is disposed above the backplate structure by a distance, so as to form a chamber between the backplate structure and the diaphragm. A periphery of the diaphragm is embedded in the dielectric layer. The diaphragm serves as a common electrode. The first backplate and the second backplate respectively serve as a first electrode unit and a second electrode unit in conjugation with the diaphragm to form separate two capacitors.

主权项

1. A micro electro-mechanical system (MEMS) microphone device, comprising:
a substrate, having a first side and a second side, wherein a cavity is formed at the second side; a backplate structure, formed over the first side of the substrate, wherein the backplate structure includes at least a first backplate and a second backplate, wherein the first backplate and the second backplate are electric disconnected and have venting holes; a diaphragm, formed over the first side of the substrate against the backplate structure by a distance, so as to form a chamber between the backplate structure and the diaphragm, wherein the diaphragm serves as a common electrode, wherein the first backplate and the second backplate respectively serve as a first electrode unit and a second electrode unit in conjugation with the diaphragm to form separate two capacitors, the two capacitors are exposed by the cavity.