| 摘要 |
PROBLEM TO BE SOLVED: To provide a substance adsorption sensor capable of accurately detecting the variation of adsorption mass of a detected substance and the consequent variation of optical characteristics at the same time utilizing a piezoelectric element. SOLUTION: A crystal substrate 1 is the one whose crystal cutting azimuth is AT cut. Crystal oscillating electrodes 2, 3 which are Ag electrodes 2, 3 formed of silver Ag, are formed on the crystal substrate 1 by vacuum evaporation. The Ag electrode 3 which is the electrode of the crystal substrate 1 as a matter of course, is also used as a metal thin film for resonance excitation of surface plasmon in this embodiment, that is, the Ag electrode 3 serves as both the electrode of the crystal substrate 1 and the metal thin film for resonance excitation of the surface plasmon SP. COPYRIGHT: (C)2009,JPO&INPIT
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