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发明名称
TARGET ASSEMBLY
摘要
백킹 플레이트 상에, 본딩재를 개재하여, 복수의 산화물 타겟 부재가 간격을 두고 배치된 타겟 조립체. 상기 타겟 조립체는, 산화물 타겟 부재와 백킹 플레이트 사이에, 상기 간격을 가교하여 설치된, Ni, Si, Hf 및 Ta로 이루어지는 군으로부터 선택되는 적어도 1종 또는 2종 이상으로 이루어지는 뒷받침 부재를 갖는다.
申请公布号
KR101643510(B1)
申请公布日期
2016.07.27
申请号
KR20157001469
申请日期
2013.07.19
申请人
가부시키가이샤 코베루코 카겐
发明人
오치 모토타카;하타 히데오;마츠무라 히로미
分类号
H01L21/02;H01L29/786
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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