发明名称 LIQUID EJECTION HEAD AND METHOD OF PROCESSING SILICON SUBSTRATE
摘要 Provided is a liquid ejection head, including: a substrate including a supply path passing through the substrate from a first surface of the substrate to a second surface thereof opposite to the first surface; and a member bonded to the second surface of the substrate via an adhesive, in which an inner wall of the supply path has a portion substantially in parallel with the second surface.
申请公布号 US2016347064(A1) 申请公布日期 2016.12.01
申请号 US201615138421 申请日期 2016.04.26
申请人 CANON KABUSHIKI KAISHA 发明人 Kishimoto Keisuke;Yonemoto Taichi
分类号 B41J2/16;H01L21/268;H01L21/311;H01L21/306;H01L21/308 主分类号 B41J2/16
代理机构 代理人
主权项 1. A liquid ejection head, comprising: a substrate including a supply path passing through the substrate from a first surface of the substrate to a second surface thereof opposite to the first surface; and a member bonded to the second surface of the substrate via an adhesive, wherein an inner wall of the supply path has a portion substantially in parallel with the second surface.
地址 Tokyo JP