An apparatus and method for transferring particles by the use of a transfer tool to at least a portion of which is applied a vacuum to cause particles to jump from a particle source to the transfer tool.
申请公布号
WO2016196795(A1)
申请公布日期
2016.12.08
申请号
WO2016US35521
申请日期
2016.06.02
申请人
3M INNOVATIVE PROPERTIES COMPANY
发明人
NIENABER, Aaron K.;KLAERS, Logan J.;CLARK, John C.