发明名称 METHOD OF TRANSFERRING PARTICLES TO A SUBSTRATE
摘要 An apparatus and method for transferring particles by the use of a transfer tool to at least a portion of which is applied a vacuum to cause particles to jump from a particle source to the transfer tool.
申请公布号 WO2016196795(A1) 申请公布日期 2016.12.08
申请号 WO2016US35521 申请日期 2016.06.02
申请人 3M INNOVATIVE PROPERTIES COMPANY 发明人 NIENABER, Aaron K.;KLAERS, Logan J.;CLARK, John C.
分类号 H01L21/48;H01L21/764 主分类号 H01L21/48
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