| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing unit provided with a communication function of readily changing a variable in communication with a host computer. SOLUTION: When an event occurs in a slave controller 21, a device control module 220 of a main controller 20 transfers the event or port number to a communication control module 210 and stores the value of a variable accompanying the event in a database 240 via database management software 230. The communication control module 210 acquires the value of the variable stored in the database 240 based on the port number given by the device control module 220 and sends the event and the variable value to a host computer as a message. |
