INTEGRATION OF ELECTROMAGNETIC DETECTOR ON INTEGRATED CHIP

摘要

A device includes an integrated circuit (IC) and at least one ultra-small resonant structure and a detection mechanism are formed on said IC (100). At least the ultra-small resonant structure portion of the device is vacuum packaged. The ultra-small resonant structure includes a plasmon detector having a transmission line (108) The detector mechanism includes a generator mechanism (102, 104) constructed and adapted to generate a beam of charged particles (105) along a path adjacent to the transmission line; and a detector microcircuit (106) disposed along said path; at a location after said beam has gone past said line, wherein the generator mechanism and the detector microcircuit are disposed adjacent transmission line and wherein a beam of charged particles from the generator mechanism to the detector microcircuit electrically couples a plasmon wave traveling along the metal transmission line to the microcircuit The detector mechanism may be electrically connected to the underlying IC.