CORROSION RESISTANT MEMBER, ELECTROSTATIC CHUCK MEMBER, AND METHOD OF PRODUCING THE CORROSION RESISTANT MEMBER

摘要

PROBLEM TO BE SOLVED: To provide a corrosion resistant member to be used in a production line of a semiconductor production apparatus, strengthening an adsorption power of an electrostatic chuck when applying an electric field, and weakening a residual adsorption power of the electrostatic chuck when stopping applying an electric field, an electrostatic chuck member, and a method of producing the corrosion resistant member.SOLUTION: A corrosion resistant member contains samarium and aluminium, contains an oxide having a perovskite-type structure, and has a ratio of the oxide of 80 volume% or more. A method of producing the corrosion resistant member includes: a step of producing slurry containing aluminium oxide powder and samarium oxide powder by mixing aluminium oxide powder, samarium oxide powder and a solvent so as to put a ratio of samarium:aluminium (molar ratio) in a range of (73:27)-(9:91); a step of producing mixed powder containing aluminium powder and samarium oxide powder by drying the slurry; a step of producing a molding by molding the mixed powder; and a step of producing a sintered compact by burning the molding.SELECTED DRAWING: None