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发明名称
LITHOGRAPHY TOOL HAVING A VACUUM RETICLE LIBRARY COUPLED TO A VACUUM CHAMBER
摘要
申请公布号
KR100880196(B1)
申请公布日期
2009.01.28
申请号
KR20030051942
申请日期
2003.07.28
申请人
发明人
分类号
G03F1/08;G03F7/22;G03F7/20;H01L21/027;H01L21/68;(IPC1-7):G03F7/22
主分类号
G03F1/08
代理机构
代理人
主权项
地址
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