发明名称 干渉格子を試料上に形成するための装置
摘要 A device for forming an interference grating on a sample. The device including a laser emitting a light beam of wavelength λ, a beam splitter plate splitting the light beam into first and second beams, the first beam being deflected in a first direction, a first stationary deflection mirror for deflecting the first beam onto a point P of the sample at a first constant angle of incidence &thetas;1, and at least one second stationary deflection mirror for deflecting the second beam along a final path that reaches point P of the sample at a second angle of incidence &thetas;2 in order to form an interference grating on the sample at a pitch that depends on the angular difference &thetas;. The device includes a movable deflection mirror to deflect the second beam from a plurality of first deflection points towards a plurality of second deflection points on the second mirror.
申请公布号 JP5916755(B2) 申请公布日期 2016.05.11
申请号 JP20130546797 申请日期 2011.12.21
申请人 サントル ナショナル ドゥ ラ ルシェルシュ シアンティフィク 发明人 ロンゴー クリストフ
分类号 H01L21/66 主分类号 H01L21/66
代理机构 代理人
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