Method for inspecting printing state and substrate

摘要

A test printing portion with a pattern dimension smaller than a minimum printing pattern dimension is formed on a substrate, and a printing state of this test printing portion is inspected after printing. Based on inspection results of the test printing portion, acceptability of the printing state of the entire substrate is judged. The test printing portion is created on a periphery of the substrate outside the printing pattern area or an unprinted space inside the printing pattern area. A detection device detects the test printing portion, and inspects its printing state. Based on the inspection results, the acceptability of the printing state of the entire substrate is judged. This enables the printing state to be easily inspected at low cost while securing a necessary decree of accuracy.