COATING APPARATUS AND COATING METHOD

摘要

A coating apparatus and a coating method is provided to prevent oxidization of a coating liquid by locally supplying a predetermined gas and coating the liquid under a predetermined atmosphere. Nozzles(52a to 52c) discharge a coating liquid onto a substrate(P), and the substrate is loaded on a stage(21). A nozzle moving unit(51) reciprocates the nozzles in a direction crossing a surface of the stage. The stage is enclosed by a box. A first supply port is formed on one side of the box to supply a gas into an inner space of the box, and a first exhaust port is formed on the other side of the box to drain the gas from the space. A circulating unit circulates the gas discharged from the first drain port, and a second supply port is formed on side of the box.