COMPOSITE REFRACTORY AND PRODUCTION METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a technology capable of providing a setter excellent in thermal shock resistance.SOLUTION: There is provided a composite refractory that contains as chemical components, SiC of 35 to 70 mass% and metal Si of 25 to 60 mass%, is composed of a first Si-SiC sintered body part 1 having fibrous three-dimensional structure and a second Si-SiC sintered body part 2 having function as a matrix supporting the fibrous three-dimensional structure and has structure in which the first Si-SiC sintered body part 1 is covered with the second Si-SiC sintered body 2, the first Si-SiC sintered body 1 and the second Si-SiC sintered body 2 each being composed of dense substance with a porosity of 1%.SELECTED DRAWING: Figure 2