| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a laminated piezoelectric device, which easily and surely prevents the occurrence of fastening in the grooves. <P>SOLUTION: An intermediate laminate 10 is formed by alternately laminating a green sheet layer 110 consisting of a ceramic material for forming a piezoelectric ceramic layer after baking it, and internal electrode paste layers 130 and 140 for forming electrode layers. The intermediate laminate 10 is manufactured so that vanishing layers 120 which vanish by baking are buried inside the side faces 105 thereof in the vicinity of the side faces 105. Then, the intermediate laminate 10 is baked to form the piezoelectric ceramic layer and the internal electrode layers, and to make the vanishing layers 120 vanish, thereby a laminated sintered body having air gaps buried near the side faces thereof is manufactured. Next, the side faces of the laminated sintered body are ground and the air gaps are exposed to form the grooves, thereby the ceramic laminate is obtained. Then, a pair of side face electrodes alternately electrically connected to the internal electrode layers are baked to the side face of the ceramic laminate. <P>COPYRIGHT: (C)2008,JPO&INPIT |
