发明名称 TRANSPARENT CONDUCTIVE OXIDE PILE PREPARING METHOD
摘要 <p>A transparent conductive oxide pile preparing method is provided, the method includes a substrate formed with a transparent conductive oxide film is treated by dry etching, so that pile is formed on the transparent conductive oxide film. Also, another transparent conductive oxide pile preparing method is provided, the method includes forming a transparent conductive oxide film on a substrate treated by dry etching.</p>
申请公布号 WO2010009598(A1) 申请公布日期 2010.01.28
申请号 WO2008CN73441 申请日期 2008.12.10
申请人 DONGGUAN ANWELL DIGITAL MACHINERY LTD.;FAN, CHUNWAH 发明人 FAN, CHUNWAH
分类号 H01L31/18 主分类号 H01L31/18
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