| 摘要 |
PROBLEM TO BE SOLVED: To reduce the size of a vaporization system by eliminating the need for conduits in the vaporization system, without forming a flow path for mounting a flow rate controller inside a vaporizer.SOLUTION: A vaporization system includes: a vaporizer 21 that vaporizes a liquid material; a supply rate controller 22 that controls a supply rate of the liquid material to the vaporizer 21; and a manifold block B inside which flow paths are formed, and which has a device mounting surface B1x on which both the vaporizer 21 and the supply rate controller 22 are mounted. As a result of the vaporizer 21 and the supply rate controller 22 being mounted on the device mounting surface B1x, the vaporizer 21 and the supply rate controller 22 are connected together via the flow paths R1-R4.SELECTED DRAWING: Figure 1 |
