| 摘要 |
PROBLEM TO BE SOLVED: To hold an opposite member in a simple structure and transfer an opposite member holding part between a holding position and a save position.SOLUTION: A substrate processing apparatus comprises an opposite member holding part 53 having a first flange support part 532 and a second flange support part 534, which contact a part of an opposite member flange part 516 of a top late 51 located at a first position from the underside to support the top plate 51, and in a state where the top plate 51 is located at a second position, by horizontal rotation of the opposite member holding part 53 by an opposite member holding part transfer mechanism 57, the first flange support part 532 and the second flange support part 534 are separated from the opposite member flange part 516 outward in a radial direction and arranged below the opposite member flange part 516. This enables the top plate 51 to be held in a simple structure and enables the opposite member holding part 53 to be transferred between a holding position and a save position in a simple structure regardless of a state of the top plate 51.SELECTED DRAWING: Figure 1 |
