发明名称 |
Sample-specific Reference Spectra Library |
摘要 |
A method and apparatus are provided for identifying a material with a sample-specific reference spectral list or library. A sequential approach to SEM-EDS automated mineralogy classification is carried out by performing two or more material classification analyses. A pre-classification step restricts the processing of spectra deconvolution algorithms to a subset of spectra that pass a dominant mineral criteria resulting in a significantly reduced subset of reference spectra that occur within the measured sample in pure enough form at a given minimum quantity. The following complex classification stages involving deconvolution of multiple constituents within measured spectra is based on this sample relevant subset. |
申请公布号 |
US2016245762(A1) |
申请公布日期 |
2016.08.25 |
申请号 |
US201514630704 |
申请日期 |
2015.02.25 |
申请人 |
FEI Company |
发明人 |
Owen Michael James;Donaldson Ashley;Howell Garth;Parker Phillip John Christopher |
分类号 |
G01N23/225;H01J37/244;G01J3/44;H01J37/252 |
主分类号 |
G01N23/225 |
代理机构 |
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代理人 |
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主权项 |
1. A method of identifying materials in a sample, comprising the steps of:
collecting from multiple points on the sample measurement data providing information from which the composition of the sample at the multiple points can be determined; analyzing the measurement data to identify materials present in a pure phase at any of the multiple points in the sample; forming a sample-specific reference library containing materials identified as present in a pure phase at any of the multiple points in the sample; and analyzing the measurement data using the sample-specific library to determine the composition of the multiple points on the sample. |
地址 |
Hillsboro OR US |