发明名称 Sample-specific Reference Spectra Library
摘要 A method and apparatus are provided for identifying a material with a sample-specific reference spectral list or library. A sequential approach to SEM-EDS automated mineralogy classification is carried out by performing two or more material classification analyses. A pre-classification step restricts the processing of spectra deconvolution algorithms to a subset of spectra that pass a dominant mineral criteria resulting in a significantly reduced subset of reference spectra that occur within the measured sample in pure enough form at a given minimum quantity. The following complex classification stages involving deconvolution of multiple constituents within measured spectra is based on this sample relevant subset.
申请公布号 US2016245762(A1) 申请公布日期 2016.08.25
申请号 US201514630704 申请日期 2015.02.25
申请人 FEI Company 发明人 Owen Michael James;Donaldson Ashley;Howell Garth;Parker Phillip John Christopher
分类号 G01N23/225;H01J37/244;G01J3/44;H01J37/252 主分类号 G01N23/225
代理机构 代理人
主权项 1. A method of identifying materials in a sample, comprising the steps of: collecting from multiple points on the sample measurement data providing information from which the composition of the sample at the multiple points can be determined; analyzing the measurement data to identify materials present in a pure phase at any of the multiple points in the sample; forming a sample-specific reference library containing materials identified as present in a pure phase at any of the multiple points in the sample; and analyzing the measurement data using the sample-specific library to determine the composition of the multiple points on the sample.
地址 Hillsboro OR US