LIQUID EJECTING HEAD

摘要

A liquid ejecting head includes a piezoelectric element that is disposed on a flow passage formation substrate, and discharges liquid from nozzle openings through the nozzle openings by pressurizing the liquid which fills the inside of a pressure generating chamber due to the displacement of a vibration film according to driving of the piezoelectric element, the piezoelectric element includes an insulating film formed on the vibration film, a first electrode film formed on the insulating film, a piezoelectric layer formed on the first electrode film, and a second electrode film formed on the piezoelectric layer, and the insulating film includes a lower insulating film formed on the vibration film and an upper insulating film which is formed on the lower insulating film with the same material as that of the lower insulating film, but has a different crystal structure.

主权项

1. A liquid ejecting head comprising:
a piezoelectric element that is disposed on a flow passage formation substrate, wherein the liquid ejecting head discharges liquid from nozzle openings through the nozzle openings by pressurizing the liquid which fills an inside of a pressure generating chamber due to displacement of a vibration film according to driving of the piezoelectric element, wherein the piezoelectric element includes an insulating film formed on the vibration film, a first electrode film formed on the insulating film, a piezoelectric layer formed on the first electrode film, and a second electrode film formed on the piezoelectric layer, and wherein the insulating film includes a lower insulating film formed on the vibration film and an upper insulating film which is formed on the lower insulating film with the same material as that of the lower insulating film, but has a different crystal structure.