发明名称 |
FLOW CONTROL DEVICE EQUIPPED WITH FLOW MONITOR |
摘要 |
A flow control device equipped with flow monitor includes a build-down type flow monitor unit provided on an upstream side, a flow control unit provided on a downstream side of the build-down type flow monitor unit, a signal transmission circuit connecting the build-down type flow monitor unit and the flow control unit and transmitting a monitored flow rate of the build-down type flow monitor unit to the flow control unit, and a set flow rate value adjustment mechanism being provided in the flow control unit and adjusting a set flow rate of the flow control unit based on the monitored flow rate from the build-down type flow monitor unit. |
申请公布号 |
US2016282880(A1) |
申请公布日期 |
2016.09.29 |
申请号 |
US201414778398 |
申请日期 |
2014.03.17 |
申请人 |
FUJIKIN INCORPORATED |
发明人 |
NAGASE Masaaki;HIDAKA Atsushi;NISHINO Kouji;IKEDA Nobukazu |
分类号 |
G05D7/06;G01F1/50 |
主分类号 |
G05D7/06 |
代理机构 |
|
代理人 |
|
主权项 |
1. A flow control device equipped with flow monitor, comprising:
a build-down type flow monitor unit provided on an upstream side; a flow control unit provided on a downstream side of the build-down type flow monitor unit; a signal transmission circuit connecting the build-down type flow monitor unit and the flow control unit and transmitting a monitored flow rate of the build-down type flow monitor unit to the flow control unit; and a set flow rate value adjustment mechanism being provided in the flow control unit and adjusting a set flow rate of the flow control unit based on the monitored flow rate from the build-down type flow monitor unit. |
地址 |
Osaka JP |