发明名称 FLOW CONTROL DEVICE EQUIPPED WITH FLOW MONITOR
摘要 A flow control device equipped with flow monitor includes a build-down type flow monitor unit provided on an upstream side, a flow control unit provided on a downstream side of the build-down type flow monitor unit, a signal transmission circuit connecting the build-down type flow monitor unit and the flow control unit and transmitting a monitored flow rate of the build-down type flow monitor unit to the flow control unit, and a set flow rate value adjustment mechanism being provided in the flow control unit and adjusting a set flow rate of the flow control unit based on the monitored flow rate from the build-down type flow monitor unit.
申请公布号 US2016282880(A1) 申请公布日期 2016.09.29
申请号 US201414778398 申请日期 2014.03.17
申请人 FUJIKIN INCORPORATED 发明人 NAGASE Masaaki;HIDAKA Atsushi;NISHINO Kouji;IKEDA Nobukazu
分类号 G05D7/06;G01F1/50 主分类号 G05D7/06
代理机构 代理人
主权项 1. A flow control device equipped with flow monitor, comprising: a build-down type flow monitor unit provided on an upstream side; a flow control unit provided on a downstream side of the build-down type flow monitor unit; a signal transmission circuit connecting the build-down type flow monitor unit and the flow control unit and transmitting a monitored flow rate of the build-down type flow monitor unit to the flow control unit; and a set flow rate value adjustment mechanism being provided in the flow control unit and adjusting a set flow rate of the flow control unit based on the monitored flow rate from the build-down type flow monitor unit.
地址 Osaka JP