| 摘要 |
Certain disclosed accelerometer sensors and methods employ a proof mass that is acted upon by multiple feedback paths. One illustrative sensor embodiment includes an electrode arrangement proximate to a proof mass, the electrode arrangement providing multiple electrostatic force centroids on the proof mass. The sensor embodiment further includes multiple feedback paths, each feedback path independently controlling an electrostatic force for a respective centroid, and an output unit that converts signals from the multiple feedback paths into an acceleration-responsive output signal. An illustrative method embodiment derives multiple feedback signals from at least one displacement signal, applies the multiple feedback signals to an arrangement of electrodes that capacitively couple the proof mass to a substrate, and converts the multiple feedback signals into an acceleration signal. 104 ---------- - - - 0 10'108 110 Fig. 1 102 108 20 Fig 214 310 Du Fig. 3 |
